MAE 4320

Last Updated

  • Schedule of Classes - January 5, 2026 3:59PM EST

MAE 4320
Integrated Micro Sensors and Actuators: Bridging the Physical and Digital Worlds

Course information provided by the 2025-2026 Catalog.

Introduction to micro and nano devices that allow the digital world to both sense and actuate in the physical world. Design and analysis of modern MEMS/NEMS (Micro/Nano Electromechanical Systems) touch, accelerometers, gyroscopes, pressure, microphones, neural probe sensors. Design and analysis of electrostatic, piezoelectric, thermal, and magnetic actuators for frequency control and micro robotic applications. This is an interdisciplinary course drawing from mechanics, materials, solid state devices, CMOS electronics, and micro and nano fabrication. The students design, fabricate, and test a microsensor chip to implement class concepts.


Prerequisites ECE 2100.

Last 1 Terms Offered 2024FA

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Syllabi: none

  •   Regular Academic Session.  Choose one lecture, one discussion, and one laboratory. Combined with: ECE 4320, ECE 5320

  • 4 Credits Graded

  • 17929 MAE 4320   LEC 001

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    • TR Upson Hall 206
    • Jan 20 - May 5, 2026

    • Lal, A

  • Instruction Mode: In Person

  • 17972 MAE 4320   DIS 201

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  • Instruction Mode: In Person

  • 17998 MAE 4320   LAB 401

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  • Instruction Mode: In Person