ECE 5320

Integrated Micro Sensors and Actuators: Bridging the Physical and Digital Worlds

Course Description

Course information provided by the 2025-2026 Catalog.

Introduction to micro and nano devices that allow the digital world to both sense and actuate in the physical world. Design and analysis of modern MEMS/NEMS (Micro/Nano Electromechanical Systems) touch, accelerometers, gyroscopes, pressure, microphones, neural probe sensors. Design and analysis of electrostatic, piezoelectric, thermal, and magnetic actuators for frequency control and micro robotic applications. This is an interdisciplinary course drawing from mechanics, materials, solid state devices, CMOS electronics, and micro and nano fabrication. The students design, fabricate, and test a microsensor chip to implement class concepts.

Prerequisites ECE 2100 or equivalent, or permission of instructor.

Enrollment Priority Enrollment limited to: graduate students.

Last 1 Terms Offered 2024FA

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