MSE 5411

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MSE 5411

Course information provided by the Courses of Study 2023-2024.

This course provides an introduction to nanofabrication technologies with emphasis on Si-based integrated circuits manufacturing as well as modern electronics based on GaN, 2D materials etc. The lab, primarily taught in the Cornell Teaching Cleanroom, includes basic fabrication steps of lithography, metallization, plasma etching and annealing. A series of devices will be fabricated: solar cells, MOS capacitors and transistors, 2D transistors, GaN HEMTs and LEDs.

When Offered Fall.

Prerequisites/Corequisites Prerequisite or corequisite: ECE 4360/MSE 5410, AEP 6620 or equivalents.

View Enrollment Information

Syllabi: none
  •   Regular Academic Session.  Combined with: ECE 4361

  • 1 Credit Graded

  • 18636 MSE 5411   LAB 401

Syllabi: none
  •   Regular Academic Session.  Combined with: ECE 4361

  • 1 Credit Graded

  • 18637 MSE 5411   LAB 402

Syllabi: none
  •   Regular Academic Session.  Combined with: ECE 4361

  • 1 Credit Graded

  • 18638 MSE 5411   LAB 403