ECE 4360

Last Updated

  • Schedule of Classes - June 22, 2015 4:42PM EDT
  • Course Catalog - June 11, 2015 6:21PM EDT

ECE 4360
Nanofabrication for Integrated Circuits

Course information provided by the Courses of Study 2014-2015.

This course will give an introduction to modern nanofabrication technologies with emphasis on integrated circuits manufacturing. Thermal budget, scaling of geometry, pitch and registry and control of parametric yield will be used for integration guidelines. Physical principles and process modeling will be covered in lectures and labs will include a series of fabrication steps of lithography, metallization, plasma etching and annealing to produce semiconductor devices (Schottky diodes, pn junction diodes, MOS capacitors, and MOSFETs). Recent advances in nanofabrication will be briefly reviewed for their possible technology insertion and main integration challenges.

When Offered Spring.

Prerequisites/Corequisites Prerequisites: ECE 3150, CHEM 2090, or the series of CHEM 2070/2080.

View Enrollment Information

Syllabi: none

  •   Regular Academic Session.  Choose one lecture. Laboratory optional.

  • 3-4 Credits Graded

  • 12749 ECE 4360   LEC 001

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  • Please note that this class can be taken for either 3 or 4 credit hours. All students will take the lecture for 3 credits but those who would like an additional 1 credit hour (so total of 4 credits) will need to sign up for one of the OPTIONAL labs. The labs are limited enrollment and will be on a first come, first serve basis. Again, these labs are optional. Please check with Professor Kan if you should have any questions.

  • 12778 ECE 4360   LAB 401

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    • M

    • Kan, E

  • 12779 ECE 4360   LAB 402

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    • W

    • Kan, E