Course information provided by the 2026-2027 Catalog.
This course provides an introduction to nanofabrication technologies with emphasis on Si-based integrated circuits manufacturing as well as modern electronics based on GaN, 2D materials etc. The lab, primarily taught in the Cornell Teaching Cleanroom, includes basic fabrication steps of lithography, metallization, plasma etching and annealing. A series of devices will be fabricated: solar cells, MOS capacitors and transistors, 2D transistors, GaN HEMTs and LEDs.
Prerequisites or corequisite: MSE 5410 or a comparable nanofabrication and characterization course.
Last 4 Terms Offered 2026SP, 2025FA, 2025SP, 2024FA
To be determined. There are currently no textbooks/materials listed, or no textbooks/materials
required, for this section. Additional information may be found on the syllabus provided by your professor.
For the most current information about textbooks, including the timing and options for purchase, see the
Cornell Store.
To be determined. There are currently no textbooks/materials listed, or no textbooks/materials
required, for this section. Additional information may be found on the syllabus provided by your professor.
For the most current information about textbooks, including the timing and options for purchase, see the
Cornell Store.
To be determined. There are currently no textbooks/materials listed, or no textbooks/materials
required, for this section. Additional information may be found on the syllabus provided by your professor.
For the most current information about textbooks, including the timing and options for purchase, see the
Cornell Store.
To be determined. There are currently no textbooks/materials listed, or no textbooks/materials
required, for this section. Additional information may be found on the syllabus provided by your professor.
For the most current information about textbooks, including the timing and options for purchase, see the
Cornell Store.
To be determined. There are currently no textbooks/materials listed, or no textbooks/materials
required, for this section. Additional information may be found on the syllabus provided by your professor.
For the most current information about textbooks, including the timing and options for purchase, see the
Cornell Store.
