ECE 4360

Last Updated

  • Schedule of Classes - March 20, 2026 3:39PM EDT

ECE 4360
Nanofabrication and Characterization of Electronics

Course information provided by the 2026-2027 Catalog.

This course will give an introduction to modern nanofabrication technologies with emphasis on integrated circuits manufacturing. Thermal budget, scaling of geometry, pitch and registry and control of parametric yield will be used for integration guidelines. Physical principles and process modeling will be covered in lectures and labs will include a series of fabrication steps of lithography, metallization, plasma etching and annealing to produce semiconductor devices (Schottky diodes, pn junction diodes, MOS capacitors, and MOSFETs). Recent advances in nanofabrication will be briefly reviewed for their possible technology insertion and main integration challenges.


Prerequisites MSE 2620 or ECE 3150.

Last 4 Terms Offered 2025FA, 2024FA, 2023FA, 2022FA

View Enrollment Information

Syllabi: none

  •   Regular Academic Session.  Combined with: MSE 5410

  • 3 Credits Graded

  • 15488 ECE 4360   LEC 001

  •  
    • TR
    • Aug 24 - Dec 7, 2026

    • Cha, J

  • Instruction Mode: In Person

    Must attend a meeting for lab safety and policies in the 1st week of classes. This can also be completed virtually prior to participating in the first Lab Module in the 2nd week.